JPH0520632B2 - - Google Patents

Info

Publication number
JPH0520632B2
JPH0520632B2 JP59134696A JP13469684A JPH0520632B2 JP H0520632 B2 JPH0520632 B2 JP H0520632B2 JP 59134696 A JP59134696 A JP 59134696A JP 13469684 A JP13469684 A JP 13469684A JP H0520632 B2 JPH0520632 B2 JP H0520632B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
element unit
displacement
actuator
displacement member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59134696A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113071A (ja
Inventor
Shigekazu Nagai
Tetsuo Kukuminato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP59134696A priority Critical patent/JPS6113071A/ja
Publication of JPS6113071A publication Critical patent/JPS6113071A/ja
Publication of JPH0520632B2 publication Critical patent/JPH0520632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59134696A 1984-06-28 1984-06-28 アクチユエ−タ Granted JPS6113071A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59134696A JPS6113071A (ja) 1984-06-28 1984-06-28 アクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59134696A JPS6113071A (ja) 1984-06-28 1984-06-28 アクチユエ−タ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3073326A Division JPH04222473A (ja) 1991-04-05 1991-04-05 アクチュエータの制御方法

Publications (2)

Publication Number Publication Date
JPS6113071A JPS6113071A (ja) 1986-01-21
JPH0520632B2 true JPH0520632B2 (en]) 1993-03-22

Family

ID=15134453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59134696A Granted JPS6113071A (ja) 1984-06-28 1984-06-28 アクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS6113071A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0193678A (ja) * 1987-09-30 1989-04-12 Toto Ltd 自動開閉弁

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866380A (ja) * 1981-10-15 1983-04-20 Matsushita Electric Ind Co Ltd 電歪基板
JPS57197882A (en) * 1982-05-26 1982-12-04 Hitachi Ltd Piezoelectric oscillator

Also Published As

Publication number Publication date
JPS6113071A (ja) 1986-01-21

Similar Documents

Publication Publication Date Title
JP4758098B2 (ja) 単体圧電モータ
CN111954976B (zh) 紧凑型压电惯性驱动台
CN109104118B (zh) 结构一体化原位驱动全位移复合放大式压电尺蠖直线平台
CN111711381B (zh) 一种实现双向驱动的粘滑式压电驱动器及控制方法
US6380661B1 (en) Linear incremental bi-directional motor
JP2010525571A5 (en])
US20020000518A1 (en) Linear motor having piezo actuators
CN108199609A (zh) 一种基于非牛顿流体的压电惯性驱动器
JPH0520632B2 (en])
US5134335A (en) Linear actuator
CN104617811A (zh) 单对致动器驱动的摩擦式双向直线运动微马达及制备方法
JPH0520633B2 (en])
JPH053230B2 (en])
WO1982003896A1 (en) Double cylinder unit
JPH04222473A (ja) アクチュエータの制御方法
CN212782914U (zh) 一种磁力伸缩关节
EP4128515A1 (en) Method of controlling at least two interacting piezoelectric actuators
CN103427703A (zh) 基于剪切压电效应的微型纳米马达
CN108063564A (zh) 一种新型摩擦式直线压电驱动器
KR20070101511A (ko) 초소형 압전 리니어 모터
JPS6281985A (ja) アクチユエ−タ
JPH0449350B2 (en])
WO2010149199A1 (en) Electromechanical motor
JPS63107468A (ja) 圧電型リニアアクチユエ−タ
CN216672878U (zh) 移动平台及其驱动结构